滚针电动缸
什么是滚针电动缸? What is Million Actuator

滚针电动缸是一种直线运动电动缸，采用艾塞路独创的滚针式导柱“精密滚针导柱”。

精密滚针导柱采用滚针作为滚动体，实现了高精度的直线性。因此，滚针电动缸是一种具有3个“1μm”的高精度、高刚性直线运动电动缸。

Million Actuator is a linear actuator that ISEL original roller type guide “Million Guide” is equipped inside. The “Million Guide” adopts needle rollers as rolling elements, and obtains the high precision linear travelling. Million Actuator holds the accuracy of three kinds of“1 micron”with high precision and high rigidity.

采用高刚性、高精度滚针式直线运动导柱“精密滚针导柱”
High Rigidity & High Precision Roller type linear motion guide “Million Guide”equipped inside.
从点到线 Point to Line
采用滚珠时(滚珠型)
Ball case (Ball type)
点接触
Point contact
接触面积小
Small contact area
采用滚针时(精密滚针导柱)
Roller case (Million Guide)
线接触
Line contact
接触面积大
Small contact area
3个“1μm” Three kinds of“1μm!”
刚性1μm
1μm“Rigidity”
进给精度1μm
1μm“Feed Accuracy”
直进性1μm
1μm“Linear Travelling”
用途 Applications
反射镜和透镜微调
Minute adjustment of the Mirror and Lens
对准台X・Y・θ轴调整
X/Y/θ axis adjustment of the Alignment stage
相机对焦
Camera Focus
试验装置
Test equipment
感应器调整
Sensor adjustment
Z 轴平台定位
Z axis stage positioning
  • 步进曝光机等各种光学设备的透镜和反射镜 移动、微小角度调整
  • 对准台 X・Y・θ轴调整
  • 相机、感应器位置调整
  • Lens and mirror movement, minute angle adjustment of optical instruments like the stepper etc
  • X/Y/θaxis adjustment of the alignment stage
  • Positioning adjustment of the camera and sensor
  • 显微镜、望远镜的透镜和反射镜调整
  • 工作台定位
  • 半导体、液晶制造装置
  • 各种自动设备、试验装置等
  • Lens and mirror adjustment of the microscope/ telescope
  • Table positioning
  • Manufacturing equipment of the semiconductor and liquid crystal
  • Automatic machine and test equipment etc.
滚针电动缸实现刚性1μm※1
Million Actuator has 1μm Rigidity

采用高精度的宽幅滚针，刚性比原来的滚珠类型提高了10倍以上。

High precision wide roller realizes over 10 times rigidity compared to the conventional ball type.

接触面积比较
Comparison of Contact Area
精密滚针导柱接触面积大， 实现了高刚性。
Million Guide realizes high rigidity for its large contact area.
采用滚珠时(滚珠型)
Ball case (Ball type)
点接触
Point contact
接触面积小
Small contact area
采用滚针时(精密滚针导柱)
Roller case (Million Guide)
线接触
Line contact
接触面积大
Small contact area
侧压刚性弯曲比较
Comparison of Lateral Pressure Deflection (Rigidity)
精密滚针导柱采用事例 Application examples of Million Guide
精密滚针导柱，由于其高刚性在以下这些地方也被广泛使用。
Million Guide is used for the following applications by its high rigidity.
马达铁芯的冲切模具 Punching Die of Motor core
TAB胶带冲切模具 Punching Die of TAB tape

※1根据使用条件数值可能会有所不同。 ※1 Values may vary by the applications/conditions.

滚针电动缸的送给精度1μm※1
Million Actuator has 1μm Feed Accuracy

使用高精度的宽幅型的滚针、保持刚性的同时成功实现了低负荷。 因此滚动阻力被抑制到极限，达到了1μm进给精度。
利用这个高进给精度、在曝光机的镜头 · 镜片 · 平台的高精度定位等方面精密滚针导柱被广泛使用。

ISEL has succeeded in low preload with keeping rigidity by using high precision wide rollers. Million Guide has achieved 1 micron feed accuracy by minimizing the rolling resistance to the limit. For its high feed accuracy, Million Guide is adopted for high precision positioning of the mirror, lens and table of the exposure machine.

滚针式的优点
Advantages of Roller type
滚珠循环式的场合
Circular ball type

滚珠之间相互接触、碰撞而产生的摩擦，造成磨损、脏污、 发热等。另外，循环时负荷的加压、减压反复发生。非常容 易造成振动。

Ball contact/ collision makes friction, leading to wear, dust and heat emission. The preload off and on are repeated at the ball circulation, and it makes one of major vibration factors.

精密滚针导柱(滚针)的场合
Million Guide (Roller type)

滚针之间相互不接触,不会发生转动体的接触、碰撞、摩擦。 另外，因为是非循环、低负荷，不会造成加压时冲击、振动也 减少。能够实现顺畅、微小的送给。

Rollers do not contact each other, and no contact, collision and friction occurs to rolling elements. No circulation and low preload structure makes less entry impact and vibration, and is smooth and ideal for minute feeding.

超低振动支撑着高进给精度
Ultra low vibration supporting high dynamic accuracy

和滚珠类型相比，滚针导柱到达1/20 以下的低振动! 对于微小进给量最合适!

Dynamic accuracy ensured by low vibration under 1/20 compared to that of ball type.

响应速度支撑着1μm的进给精度
Tracking ability supporting 1μm feed accuracy

将滚动阻力控制到极限、把0.1μm为1单位的微小进给量变成可能，实现了卓越的响应速度。

Million Guide holds excellent tracking ability to enable minute feeding of 0.1 micron unit by minimizing the rolling resistance to the limit.

指定脉冲信号 (pls) Command pulse (pls)
※GMA2815M中无负荷时数据。※The data at no load on GMA2815M.
※1μm的进给精度表示可以以1μm为单位进行微小进给。进给方向的重复定位精度在 ±1.0μm以下。本数值不包含滚珠丝杠的导程误差，因此在所有行程之间会加上滚珠丝杠导程误差。 数值可能会因使用条件而异。
※1“1 micron feed accuracy”means that minute feeding of 1 micron unit is possible with our Million actuator. Repetitive positioning accuracy is less than ±1.0 micron in the feed direction. This value does not include the lead error of ball screw; considering the range of whole stroke, the lead error of ball screw needs to be added to this. Values may vary by the applications/ conditions.
滚针电动缸的直进性1μm※1
Million Actuator has 1μm Linear Travelling

实现了高刚性、低振动的滚针导柱具有良好直线性、特别是往复运动精度比原来提高3倍 以上。利用这个特性、应用于微细的PCB基板开孔、半导体的组装等,在精密半导体领域 被广泛使用。

Million Guide realizes excellent linear travelling, with features of high rigidity and low vibration. Million Guide repeatability, in particular, is over 3 times as accurate as that of conventional one. For its advantage, Million Guide is widely adopted in the field of precision semiconductor, like minute drilling on PCB and semiconductor mounting etc.

X·Y轴全方向 往复运动精度比较
Comparison of Repeatability:X/Y directions

振动大、刚性低的滚珠导柱的话，位置精度偏差大不稳定。滚针气缸的话，振动小并且到达很好的往复运动精度!

Affected by vibration, low-rigidity ball type has larger variation in positional accuracy. Million Actuator realizes excellent repeatability for its low vibration feature.

X·Y·Z轴全方向 重复定位精度比较
Repetitive Positioning Accuracy:X/Y/Z directions

高精度滚针导柱和滚珠丝杠的配套组合，滚针气缸的重复定位精度实现了X·Y·Z全方向±1.0μm!

Combination of high precision Million Guide and ball screw makes the repetitive positioning accuracy of Million Actuator within ± 1.0μm in X/Y/Z directions.

采用滚针电动缸的优点
Merits of Adopting Million Actuator
1.
超高精度化
Ultra High Precision
成功实现了以前不可能达到的1μm单位高精度定位，提高了产品精度!
Improves product accuracy by high precision positioning of 1μm unit, which has been impossible before.
2.
节省空间
Space Saving
简易构造，节省空间!
Compact structure does not take much room.
3.
减少工时
Workload Reduction
一体化构造，缩短客户设计时间!
Integral construction reduces the customer’s device design time.
安装简单，缩短组装时间!
Easy installation shortens assembly time.
本体外侧上装备有自动开关。 → 调整开关位置很容易，节省空间。
Auto switch is equipped standard on the outside body. → Easy switch position adjustment, and space saving.
有带电机和不带电机两种类型。客户可指定电机。 → 结合客户的控制样式、要求等，也可代为选定电机。
Motorless specification is also in standard line-up, as well as the specification with motor. The specified motor type can be equipped that the customer wants. → You can select the motor according to your control specifications and demand/request.
滚针电动缸标准的订单型号 Order type of Standard Million Actuator
外形尺寸图 Dimensional Outline Drawing
GMA2010
※虚线处是标准电机 ※Broken line part means standard motor.
GMA2815
※虚线处是标准电机 ※Broken line part means standard motor.
GMA4220
※虚线处是标准电机 ※Broken line part means standard motor.
GMA6025
※虚线处是标准电机 ※Broken line part means standard motor.
  • 上述规格如有变更，恕不另行通知。
  • The above specifications are subject to change without advanced notice.
电机图纸提供示例如下 Examples of motor drawings to be provided are as follows
GMA2010 电机类型
GMA2010 Motor Type
D
15
16
GMA2815 电机类型
GMA2815 Motor Type
L
20
15
GMA4220 电机类型
GMA4220 Motor Type
D
φ5
φ6
GMA6025 电机类型
GMA6025 Motor Type
d D P
φ6.35 φ38.1 47.14
φ10 φ36 50
正式产品/标准式样 滚针电动缸(GMA系列)式样(搭载电机使用时的参考值) Line-up / Standard Specifications Million Actuator (GMA Series) Specifications (Reference values when using the equipped motors)
名称Product name 滚针电动缸 Million Actuator
型号 Type GMA2010 GMA2815 GMA4220 GMA6025
安装角落 Installation width 20×20mm 28×28mm 42×42mm 60×60mm
有效行程※3 Effective stroke 10mm 15mm 20mm 25mm
轴方向推力※1
Axial thrust
额定
Rating		 30N 50N 150N 300N
瞬间最大
Instantaneous maximum		 60N 100N 250N 500N
送给速度※1
Feed speed
额定
Rating
10mm/sec(电机 600min-1 时)
10mm/sec(In case of Motor 600min-1)
15mm/sec (电机 450min-1 时)
15mm/sec(In case of Motor 450min-1)
20mm/sec (电机 400min-1 时)
20mm/sec(In case of Motor 400min-1)
瞬间最大
Instantaneous maximum
50mm/sec(电机 3000min-1 时)
50mm/sec(In case of Motor 3000min-1)
100mm/sec(电机 3000min-1 时)
100mm/sec(In case of Motor 3000min-1)
100mm/sec(电机 2000min-1 时)
100mm/sec(In case of Motor 2000min-1)
送给丝杠 Feed screw 精密研磨滚珠丝杠 Precision ground ball screw
丝杠导线 Screw lead 1mm 2mm 3mm
重复定位精度
Repetitive positioning accuracy		 ±1.0μm
空转 Lost motion 3.0μm
分辨率 Resolution 0.1μm/pls※2 0.1μm/pls※2 0.2μm/pls※2 0.3μm/pls※2
搭载标准电机(参考)
Standard motor(Reference)		 (株)三明步进电机 Si servo(附带编码器) Stepping motor Si Servo (with encoder) made by Sanmei Co., Ltd.
TS3692N61S02TS3641N61S02TS3617N370S04TS3653N324S04
电源电压 Power supply voltage DC24V±10%
感应器 Sensor 无
磁性接近感应器 附带2个(ASA电子工业(株)制 ACH02RW)
Magnetic proximity switches 2 pcs (ACH02RW made by ASA Electronics Industry)
重量 约0.25kg Approx.0.25kg 约0.4kg Approx.0.4kg 约1.3kg Approx.1.3kg 约3.7kg Approx.3.7kg
使用温度范围
Operating temperature range 		0~50°C
  • ※ 搭载电机使用时的注意事项参考:
  • ※1 请不要长时在最大推力或最大速度下使用。可能会造成滚珠丝杠的寿命显著下降，最大推力或最大速度请在瞬时使用。
  • ※2 电机编码器的分辨率设定为10000pls/rev时的值。
  • ※3 请在装置侧安装挡块等，确保其动作时不会超过有效行程。
  • ※ 上面数据是带有标准电机时的数据。
  • ※ 重量中包含标准电机的重量(不含电缆重量)。
  • ※ 上面重复定位精度数据要求丝杠的温度是固定的。(不考虑周围・丝杠温度变化带来的影响 )
  • ※Precautions when using the equipped motors:
  • ※1 Do not operate under the maximum thrust/ speed at all times, or the ball screw life could be significantly shortened; The maximum thrust/ speed operation should be limited to instantaneous use.
  • ※2 Values at resolution set of motor encoder“10000pls/rev”
  • ※3 Install a stopper etc. on the device side so that it does not run beyond its effective stroke.
  • ※ It is the data with the standard motor equipped.
  • ※ The weight includes the standard motor. (Cable weight is excluded.)
  • ※ The repetitive positioning accuracy is limited under the condition where the actuator temperature is constant. (The influence is not considered by environmental/ actuator temperature change.)